An Active Control Scheme for Improving Mass Resolution of Film Bulk Acoustic Resonators

HE Xue-feng; LIU Xing; YIN Xian-fang; WEN Zhi-yu; CHEN Ke-wan

doi:10.3879/j.issn.1000-0887.2011.06.007

Volume 32 Issue 6

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HE Xue-feng, LIU Xing, YIN Xian-fang, WEN Zhi-yu, CHEN Ke-wan. An Active Control Scheme for Improving Mass Resolution of Film Bulk Acoustic Resonators[J]. Applied Mathematics and Mechanics, 2011, 32(6): 702-709. doi: 10.3879/j.issn.1000-0887.2011.06.007

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An Active Control Scheme for Improving Mass Resolution of Film Bulk Acoustic Resonators

doi: 10.3879/j.issn.1000-0887.2011.06.007

1.
Key Laboratory of Optoelectronic Technology and Systems of the Education Ministry of China, Chongqing University, Chongqing 400044, P. R. China;

Received Date: 2011-01-15
Rev Recd Date: 2011-04-14
Publish Date: 2011-06-15

Abstract

Abstract

High mass resolution of sensors based on film bulk acoustic resonators(FBARs)was required for detection of small molecules with low concentration.An active control scheme was herein presented for improving the mass resolution of FBAR sensors by adding a feedback voltage,which was obtained by giving a constant gain and a constant phase shift to the current on the electrodes of the FBAR sensors,onto the driving voltage between two electrodes of the FBAR sensors.The acoustic energy produced by the feedback voltage partly compensates the acoustic energy loss from the material damping and the acoustic scattering,which as a consequence improves the quality factor and the mass resolution of FBAR sensors. The explicit expression relating the impedance to the frequency for an FBAR sensor with the active control was derived based on continuum theory by neglecting the influence of the electrodes.Numerical simulations show that the impedance of the FBAR sensor strongly depends on the gain and phase shift of the feedback voltage and the mass resolution of the FBAR sensor can be greatly improved when appropriate gain and phase shift of the feedback voltage are used.Above active control scheme is also an effective solution to improve the resolution of the quartz crystal microbalance(QCM).
- film bulk acoustic resonator,
- sensor,
- active control,
- impedance,
- resolution

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References(26)

References

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