Tang Fu-lin, Chen Yun-ming. The End and Spacing Effect of Induction Coil of Finite Length on the EM Field in HF Plasma[J]. Applied Mathematics and Mechanics, 1988, 9(11): 1015-1022.
Citation: Tang Fu-lin, Chen Yun-ming. The End and Spacing Effect of Induction Coil of Finite Length on the EM Field in HF Plasma[J]. Applied Mathematics and Mechanics, 1988, 9(11): 1015-1022.

The End and Spacing Effect of Induction Coil of Finite Length on the EM Field in HF Plasma

  • Received Date: 1987-07-28
  • Publish Date: 1988-11-15
  • In practical applications the diameter and height of the induction coil have the same order of magnitude, hence the end effect is unnegligible in Iff(high frequency) plasma theory.The present paper calculates the electromagnetic field under the assumption of infinite plasma column with uniform conductivity.The results show that the magnetic induction differs greatly from that in vacuum case at axis, and even the direction is reversed in some cases.In contrast, the difference is not large at plasma surface, and the,phase lag between B and E there changes little, either.Hence, the EM field at the surface in vacuum case can be more adequately applied as boundary condition in HF plasma computation.
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  • [1]
    中国科学院力学研究所六室高频组,30KW高频等离子体感应加热设备及等离于体发生器研制报告(1980).
    [2]
    Graves,David B.and K.F.Jensen,A continuum model of DC and RF discharges,IEEE Transactions on Plasma Science,PS-14(1982),78-91.
    [3]
    Walsh,B.W.and A.D.Stokes,Energy balance and stability of an induction heated plasma,Chemical Eng.Science,27(1972),511-518.
    [4]
    Bouios,M.,R.Gagne and R.M.Barnes,Effect of swirl and confinement on the flow and temperature fields in an inductively coupled RF plasma,Canadian J.Chem.Eng.,58(1980),367-378.
    [5]
    Jackson,J.D.,Classical Electrodynamics,John Wiley & Sons,Inc.(1976).
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