Surface Effects of AdsorptionInduced Resonance Analysis of Micro/Nanobeams via Nonlocal Elasticity
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摘要: 基于非局部理论和表面效应模型,导出表面吸附物对微纳米材料的动力学方程,研究非局部因子和表面能对微纳米传感器振动特性的影响.结果显示,非局部因子、表面能、吸附物种类、附加刚度和基底种类对微纳米结构的振动特性有重要影响.
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关键词:
- 微纳米机电系统(MEMS/NEMS)传感器 /
- 非局部理论 /
- 表面效应 /
- 振动特性 /
- 原子/分子吸附
Abstract: The governing differential equation of micro/nanobeams with atom/molecule adsorption was derived in presence of surface effects using the nonlocal elasticity. The effects of nonlocal parameter, adsorption density and the surface parameter on resonant frequency of the micro/nanobeams were investigated. It is found that, in addition to the nonlocal parameter and surface parameter, the bending rigidity and the adsorptioninduced mass exhibit different behaviors with the increase of adsorption density depending on the adatom category and the substrate material. -
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